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Position Sensing and Feedback Control for a High Precision Accelerometer: Author: Yu, Feng; Date: 2004-05-15; Program: Electrical Engineering; Abstract: High precision accelerometers have broad applications in space missions and fundamental physics research. However, conventional high precision accelerometers have disadvantages of large volume, high supply voltage and extremely high cost. In this paper, the volume of the sensing element in this accelerometer is reduced on the order of about one hundred. In order to achieve high resolution at the same time when reducing the size of the proof mass, a drag free structure is employed for the sensing element. A capacitive sensing approach is introduced and, in turn, the relationship between the def...; Download File | View full details